In the semiconductor industry chlorine trifluoride (ClF3) is used to clean chemical vapour deposition chambers. It has the advantage that it can be used to remove semiconductor material from the chamber walls without having to dismantle the chamber. Unlike most of the alternative chemicals used in this role it does not need to be activated by the use of plasma since the heat of the chamber is enough to make it decompose and react with the semiconductor material.
Chlorine Trifluoride is a corrosive, colorless gas at room temperature and pressure. It has somewhat of a sweet odor and is highly irritating even at low concentrations . Chlorine trifluoride is easily liquefied to a yellow-green liquid at low pressures and atmospheric temperatures. It freezes to white solid. It is a powerful oxidizing agent causing immediate ignition of many organic compounds, ignites many metals at elevated temperatures, and reacts violently with water or ice.
Chlorine trifluoride is of interest as a propellant for rockets and missiles. It has the ability to start reaction immediately on contact with fuels ( hypergolicity ). It has also been used in an oil well tubing cutter. It has been used for cutting pipe in oil wells as far as two miles below the surface. It is also used for CVD Chamber Cleaning .
|Cylinder Pressure (Approx. psig)||7|
|Boiling Point (°C)||11.7|
|Melting Point (°C)||-76|
|DOT Label||2.3, 5.1, 8|
|DOT Classification||Inhalation Hazard|
|CAS Registry No.||7790-91-2|
|Cylinder Outlet||CGA670, CGA728|
|Hydrogen Fluoride, HF||Maximum ppmv||600|
|Oxygen/Argon, 0/Ar||Maximum ppmv||5|
|Nitrogen, N2||Maximum ppmv||5|
|Carbon Dioxide, C02||Maximum ppmv||5|
Keywords: Chlorine Trifluoride, ClF3, 7790-91-2, 12422-22-9, 12526-02-2, CHEBI:30123, Chlorine fluoride, Chlorine fluoride (ClF3), Chlorine trifluoride (ClF3), Chlorine trifluoride [UN1749] [Poison gas], Chlorine trifluoride [UN1749] [Poison gas], Chlorotrifluoride, EINECS 232-230-4, HSDB 970, LS-53014, trifluoridochlorine, trifluorochlorine, trifluoro-lambda(3)-chlorane, Trifluorure de chlore, Trifluorure de chlore [French], UN1749
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